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Names | |
---|---|
Systematic IUPAC name
Trichloro(fluoro)silane | |
Other names
Silicon trichloride fluoride
| |
Identifiers | |
ChemSpider | |
PubChem
CID
|
|
CompTox Dashboard (
EPA)
|
|
Properties | |
SiCl3F | |
Molar mass | 153.43 g/mol |
Density | 1.477g/cm3 |
Except where otherwise noted, data are given for materials in their
standard state (at 25 °C [77 °F], 100 kPa).
|
Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials. [1]
![]() | |
Names | |
---|---|
Systematic IUPAC name
Trichloro(fluoro)silane | |
Other names
Silicon trichloride fluoride
| |
Identifiers | |
ChemSpider | |
PubChem
CID
|
|
CompTox Dashboard (
EPA)
|
|
Properties | |
SiCl3F | |
Molar mass | 153.43 g/mol |
Density | 1.477g/cm3 |
Except where otherwise noted, data are given for materials in their
standard state (at 25 °C [77 °F], 100 kPa).
|
Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials. [1]