This article needs additional citations for
verification. (February 2024) |
HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies, used to create high- aspect-ratio microstructures [1] with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
This article needs additional citations for
verification. (February 2024) |
HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies, used to create high- aspect-ratio microstructures [1] with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.